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椭偏术是一种利用线偏振光经样品反射后转变为椭圆偏振光这一性质以获得样品的光学常数的光谱测量方法.椭偏仪主要用来测量薄膜材料或块体材料的光学参数和厚度的仪器.
Abstract：Ellipsometery is a method that utilizes the property of slight elliptical polarization of reflecting light.Spectroscopic ellipsometry is used to measure the optical parameter and thickness of film material or thick material.
[1]Bruggman D A G.Berechnung Verschiedener Physikalischer Konstanten Vorheteroenen Substanzen[J].Ann Phys Leipzig,1935,24:636-664.
[2]Fouhi A R,Bloomer I.Optical Dispersion Relations for Amorphous Semiconductors and Amorphous Dielectrics[J].Phys RevB,1986,34:7018-7029.
[3]Arwin H,Martensson J,Jansen R.Line-shape Analysis of Ellipsometric Spectra on Organic Flms[J].Appl Opt,1992,31:6707-6715.
基本信息:
中图分类号:O436.3
引用信息:
[1]余平,张晋敏.椭偏仪的原理和应用[J].合肥学院学报(自然科学版),2007,No.53(01):87-90.
基金信息:
贵州省大学生创业基金项目(701059101)资助
2007-02-15
2007-02-15